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产品-Plasus

Plasus

EMICON MC/HR/SA 系統,適用於電漿設備的製程開發與診斷,以及量產機台的線上QA/QC。透過人性化的軟體介面,掌握在蝕刻、PECVD與濺鍍各類應用端的每一的電漿物種的行為與變化。

EMICON MC/HR/SA system is a powerful tool with friendly software-interface and intimate online QA/QC functions to monitor the activities of any plasma species for etching, PECVD and sputtering applications.

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SpecLine軟體具有超過50萬筆針對原子與分子的電漿光譜資料庫,是最好也是最強大的電漿光譜分析軟體。

SpecLine software is the best and powerful plasma spectra analysis software with more than 500,000 atoms, molecules database.

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PLASUS Company LogoGo to PLASUS official website

北京晨辉日升光电技术公司 2012